9/2/2011	12:21:58 AM	H2 valve closed
9/2/2011	12:21:58 AM	BCl3 valve closed
9/2/2011	12:21:58 AM	PH3 valve closed
9/2/2011	12:21:58 AM	SiCl4 pre valve closed
9/2/2011	12:21:58 AM	SiCl4 post valve closed
9/2/2011	12:21:58 AM	Main Vac valve closed
9/2/2011	12:21:58 AM	Bypass valve closed
9/2/2011	12:21:58 AM	Bubbler valve closed
9/2/2011	12:21:58 AM	Helium valve opened
9/2/2011	12:21:58 AM	Helium MFC set to  500.000000
9/2/2011	12:21:58 AM	H2 MFC set to  0.000000
9/2/2011	12:21:58 AM	BCl3 MFC set to  0.000000
9/2/2011	12:21:58 AM	PHl3 MFC set to  0.000000
9/2/2011	12:21:58 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:21:58 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:21:58 AM	Tube furnace set to 0
9/2/2011	12:22:04 AM	H2 valve closed
9/2/2011	12:22:04 AM	BCl3 valve closed
9/2/2011	12:22:04 AM	PH3 valve closed
9/2/2011	12:22:04 AM	SiCl4 pre valve closed
9/2/2011	12:22:04 AM	SiCl4 post valve closed
9/2/2011	12:22:04 AM	Main Vac valve closed
9/2/2011	12:22:04 AM	Bypass valve closed
9/2/2011	12:22:04 AM	Helium valve opened
9/2/2011	12:22:04 AM	Bubbler valve opened
9/2/2011	12:22:04 AM	Helium MFC set to  500.000000
9/2/2011	12:22:04 AM	H2 MFC set to  0.000000
9/2/2011	12:22:04 AM	BCl3 MFC set to  0.000000
9/2/2011	12:22:04 AM	PHl3 MFC set to  0.000000
9/2/2011	12:22:04 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:22:04 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:22:04 AM	Tube furnace set to 0
9/2/2011	12:27:04 AM	Helium valve closed
9/2/2011	12:27:04 AM	H2 valve closed
9/2/2011	12:27:04 AM	BCl3 valve closed
9/2/2011	12:27:04 AM	PH3 valve closed
9/2/2011	12:27:04 AM	SiCl4 pre valve closed
9/2/2011	12:27:04 AM	SiCl4 post valve closed
9/2/2011	12:27:04 AM	Main Vac valve closed
9/2/2011	12:27:04 AM	Bypass valve closed
9/2/2011	12:27:04 AM	Bubbler valve closed
9/2/2011	12:27:04 AM	Helium MFC set to  0.000000
9/2/2011	12:27:04 AM	H2 MFC set to  0.000000
9/2/2011	12:27:04 AM	BCl3 MFC set to  0.000000
9/2/2011	12:27:04 AM	PHl3 MFC set to  0.000000
9/2/2011	12:27:04 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:27:04 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:27:04 AM	Tube furnace set to 0
9/2/2011	12:27:05 AM	Helium valve closed
9/2/2011	12:27:05 AM	H2 valve closed
9/2/2011	12:27:05 AM	BCl3 valve closed
9/2/2011	12:27:05 AM	PH3 valve closed
9/2/2011	12:27:05 AM	SiCl4 pre valve closed
9/2/2011	12:27:05 AM	SiCl4 post valve closed
9/2/2011	12:27:05 AM	Main Vac valve closed
9/2/2011	12:27:05 AM	Bubbler valve closed
9/2/2011	12:27:05 AM	Bypass valve opened
9/2/2011	12:27:05 AM	Helium MFC set to  0.000000
9/2/2011	12:27:05 AM	H2 MFC set to  0.000000
9/2/2011	12:27:05 AM	BCl3 MFC set to  0.000000
9/2/2011	12:27:05 AM	PHl3 MFC set to  0.000000
9/2/2011	12:27:05 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:27:05 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:27:05 AM	Tube furnace set to 0
9/2/2011	12:27:56 AM	Helium valve closed
9/2/2011	12:27:56 AM	H2 valve closed
9/2/2011	12:27:56 AM	BCl3 valve closed
9/2/2011	12:27:56 AM	PH3 valve closed
9/2/2011	12:27:56 AM	SiCl4 pre valve closed
9/2/2011	12:27:56 AM	SiCl4 post valve closed
9/2/2011	12:27:56 AM	Main Vac valve closed
9/2/2011	12:27:56 AM	Bubbler valve closed
9/2/2011	12:27:56 AM	Bypass valve opened
9/2/2011	12:27:56 AM	Helium MFC set to  0.000000
9/2/2011	12:27:56 AM	H2 MFC set to  0.000000
9/2/2011	12:27:56 AM	BCl3 MFC set to  0.000000
9/2/2011	12:27:56 AM	PHl3 MFC set to  0.000000
9/2/2011	12:27:56 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:27:56 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:27:56 AM	Tube furnace set to 0
9/2/2011	12:28:56 AM	Helium valve closed
9/2/2011	12:28:56 AM	H2 valve closed
9/2/2011	12:28:56 AM	BCl3 valve closed
9/2/2011	12:28:56 AM	PH3 valve closed
9/2/2011	12:28:56 AM	SiCl4 pre valve closed
9/2/2011	12:28:56 AM	SiCl4 post valve closed
9/2/2011	12:28:56 AM	Bypass valve closed
9/2/2011	12:28:56 AM	Bubbler valve closed
9/2/2011	12:28:56 AM	Main Vac valve opened
9/2/2011	12:28:56 AM	Helium MFC set to  0.000000
9/2/2011	12:28:56 AM	H2 MFC set to  0.000000
9/2/2011	12:28:56 AM	BCl3 MFC set to  0.000000
9/2/2011	12:28:56 AM	PHl3 MFC set to  0.000000
9/2/2011	12:28:56 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:28:56 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:28:56 AM	Tube furnace set to 0
9/2/2011	12:28:57 AM	Run finished at 12:28 AM
9/2/2011	12:45:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/2/2011	12:45:59 AM	Recipe started at 12:45 AM
9/2/2011	12:45:59 AM	Helium valve closed
9/2/2011	12:45:59 AM	H2 valve closed
9/2/2011	12:45:59 AM	BCl3 valve closed
9/2/2011	12:45:59 AM	PH3 valve closed
9/2/2011	12:45:59 AM	SiCl4 pre valve closed
9/2/2011	12:45:59 AM	SiCl4 post valve closed
9/2/2011	12:45:59 AM	Main Vac valve closed
9/2/2011	12:45:59 AM	Bypass valve closed
9/2/2011	12:45:59 AM	Bubbler valve closed
9/2/2011	12:45:59 AM	Helium MFC set to  0.000000
9/2/2011	12:45:59 AM	H2 MFC set to  0.000000
9/2/2011	12:45:59 AM	BCl3 MFC set to  0.000000
9/2/2011	12:45:59 AM	PHl3 MFC set to  0.000000
9/2/2011	12:45:59 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:45:59 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:45:59 AM	Tube furnace set to 0
9/2/2011	12:46:02 AM	H2 valve closed
9/2/2011	12:46:02 AM	BCl3 valve closed
9/2/2011	12:46:02 AM	PH3 valve closed
9/2/2011	12:46:02 AM	SiCl4 pre valve closed
9/2/2011	12:46:02 AM	SiCl4 post valve closed
9/2/2011	12:46:02 AM	Main Vac valve closed
9/2/2011	12:46:02 AM	Bypass valve closed
9/2/2011	12:46:02 AM	Bubbler valve closed
9/2/2011	12:46:02 AM	Helium valve opened
9/2/2011	12:46:02 AM	Helium MFC set to  500.000000
9/2/2011	12:46:02 AM	H2 MFC set to  0.000000
9/2/2011	12:46:02 AM	BCl3 MFC set to  0.000000
9/2/2011	12:46:02 AM	PHl3 MFC set to  0.000000
9/2/2011	12:46:02 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:46:02 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:46:02 AM	Tube furnace set to 0
9/2/2011	12:47:03 AM	Helium valve closed
9/2/2011	12:47:03 AM	H2 valve closed
9/2/2011	12:47:03 AM	BCl3 valve closed
9/2/2011	12:47:03 AM	PH3 valve closed
9/2/2011	12:47:03 AM	SiCl4 pre valve closed
9/2/2011	12:47:03 AM	SiCl4 post valve closed
9/2/2011	12:47:03 AM	Main Vac valve closed
9/2/2011	12:47:03 AM	Bypass valve closed
9/2/2011	12:47:03 AM	Bubbler valve closed
9/2/2011	12:47:03 AM	Helium MFC set to  0.000000
9/2/2011	12:47:03 AM	H2 MFC set to  0.000000
9/2/2011	12:47:03 AM	BCl3 MFC set to  0.000000
9/2/2011	12:47:03 AM	PHl3 MFC set to  0.000000
9/2/2011	12:47:03 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:47:03 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:47:03 AM	Tube furnace set to 0
9/2/2011	12:47:04 AM	Run finished at 12:47 AM
9/2/2011	12:47:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/2/2011	12:49:26 AM	Helium MFC set to  500.000000
9/2/2011	12:49:28 AM	Helium valve opened
9/2/2011	12:50:01 AM	Bubbler valve opened
9/2/2011	12:50:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/2/2011	12:51:04 AM	Recipe started at 12:50 AM
9/2/2011	12:51:04 AM	Helium valve closed
9/2/2011	12:51:04 AM	H2 valve closed
9/2/2011	12:51:04 AM	BCl3 valve closed
9/2/2011	12:51:04 AM	PH3 valve closed
9/2/2011	12:51:04 AM	SiCl4 pre valve closed
9/2/2011	12:51:04 AM	SiCl4 post valve closed
9/2/2011	12:51:04 AM	Main Vac valve closed
9/2/2011	12:51:04 AM	Bubbler valve closed
9/2/2011	12:51:04 AM	Bypass valve opened
9/2/2011	12:51:04 AM	Helium MFC set to  0.000000
9/2/2011	12:51:04 AM	H2 MFC set to  0.000000
9/2/2011	12:51:04 AM	BCl3 MFC set to  0.000000
9/2/2011	12:51:04 AM	PHl3 MFC set to  0.000000
9/2/2011	12:51:04 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:51:04 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:51:04 AM	Tube furnace set to 0
9/2/2011	12:52:00 AM	Helium valve closed
9/2/2011	12:52:00 AM	H2 valve closed
9/2/2011	12:52:00 AM	BCl3 valve closed
9/2/2011	12:52:00 AM	PH3 valve closed
9/2/2011	12:52:00 AM	SiCl4 pre valve closed
9/2/2011	12:52:00 AM	SiCl4 post valve closed
9/2/2011	12:52:00 AM	Main Vac valve closed
9/2/2011	12:52:00 AM	Bubbler valve closed
9/2/2011	12:52:00 AM	Bypass valve opened
9/2/2011	12:52:00 AM	Helium MFC set to  0.000000
9/2/2011	12:52:00 AM	H2 MFC set to  0.000000
9/2/2011	12:52:00 AM	BCl3 MFC set to  0.000000
9/2/2011	12:52:00 AM	PHl3 MFC set to  0.000000
9/2/2011	12:52:00 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:52:00 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:52:00 AM	Tube furnace set to 0
9/2/2011	12:52:30 AM	Helium valve closed
9/2/2011	12:52:30 AM	H2 valve closed
9/2/2011	12:52:30 AM	BCl3 valve closed
9/2/2011	12:52:30 AM	PH3 valve closed
9/2/2011	12:52:30 AM	SiCl4 pre valve closed
9/2/2011	12:52:30 AM	SiCl4 post valve closed
9/2/2011	12:52:30 AM	Bypass valve closed
9/2/2011	12:52:30 AM	Bubbler valve closed
9/2/2011	12:52:30 AM	Main Vac valve opened
9/2/2011	12:52:30 AM	Helium MFC set to  0.000000
9/2/2011	12:52:30 AM	H2 MFC set to  0.000000
9/2/2011	12:52:30 AM	BCl3 MFC set to  0.000000
9/2/2011	12:52:30 AM	PHl3 MFC set to  0.000000
9/2/2011	12:52:30 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:52:30 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:52:30 AM	Tube furnace set to 0
9/2/2011	12:53:00 AM	H2 valve closed
9/2/2011	12:53:00 AM	BCl3 valve closed
9/2/2011	12:53:00 AM	PH3 valve closed
9/2/2011	12:53:00 AM	SiCl4 pre valve closed
9/2/2011	12:53:00 AM	SiCl4 post valve closed
9/2/2011	12:53:00 AM	Bypass valve closed
9/2/2011	12:53:00 AM	Bubbler valve closed
9/2/2011	12:53:00 AM	Helium valve opened
9/2/2011	12:53:00 AM	Main Vac valve opened
9/2/2011	12:53:00 AM	Helium MFC set to  20.000000
9/2/2011	12:53:00 AM	H2 MFC set to  0.000000
9/2/2011	12:53:00 AM	BCl3 MFC set to  0.000000
9/2/2011	12:53:00 AM	PHl3 MFC set to  0.000000
9/2/2011	12:53:00 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:53:00 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:53:00 AM	Tube furnace set to 0
9/2/2011	12:53:30 AM	Helium valve closed
9/2/2011	12:53:30 AM	H2 valve closed
9/2/2011	12:53:30 AM	BCl3 valve closed
9/2/2011	12:53:30 AM	PH3 valve closed
9/2/2011	12:53:30 AM	SiCl4 pre valve closed
9/2/2011	12:53:30 AM	SiCl4 post valve closed
9/2/2011	12:53:30 AM	Bypass valve closed
9/2/2011	12:53:30 AM	Bubbler valve closed
9/2/2011	12:53:30 AM	Main Vac valve opened
9/2/2011	12:53:30 AM	Helium MFC set to  0.000000
9/2/2011	12:53:30 AM	H2 MFC set to  0.000000
9/2/2011	12:53:30 AM	BCl3 MFC set to  0.000000
9/2/2011	12:53:30 AM	PHl3 MFC set to  0.000000
9/2/2011	12:53:30 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:53:30 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:53:31 AM	Tube furnace set to 0
9/2/2011	12:54:01 AM	H2 valve closed
9/2/2011	12:54:01 AM	BCl3 valve closed
9/2/2011	12:54:01 AM	PH3 valve closed
9/2/2011	12:54:01 AM	SiCl4 pre valve closed
9/2/2011	12:54:01 AM	SiCl4 post valve closed
9/2/2011	12:54:01 AM	Bypass valve closed
9/2/2011	12:54:01 AM	Bubbler valve closed
9/2/2011	12:54:01 AM	Helium valve opened
9/2/2011	12:54:01 AM	Main Vac valve opened
9/2/2011	12:54:01 AM	Helium MFC set to  20.000000
9/2/2011	12:54:01 AM	H2 MFC set to  0.000000
9/2/2011	12:54:01 AM	BCl3 MFC set to  0.000000
9/2/2011	12:54:01 AM	PHl3 MFC set to  0.000000
9/2/2011	12:54:01 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:54:01 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:54:01 AM	Tube furnace set to 0
9/2/2011	12:54:31 AM	Helium valve closed
9/2/2011	12:54:31 AM	H2 valve closed
9/2/2011	12:54:31 AM	BCl3 valve closed
9/2/2011	12:54:31 AM	PH3 valve closed
9/2/2011	12:54:31 AM	SiCl4 pre valve closed
9/2/2011	12:54:31 AM	SiCl4 post valve closed
9/2/2011	12:54:31 AM	Bypass valve closed
9/2/2011	12:54:31 AM	Bubbler valve closed
9/2/2011	12:54:31 AM	Main Vac valve opened
9/2/2011	12:54:31 AM	Helium MFC set to  0.000000
9/2/2011	12:54:31 AM	H2 MFC set to  0.000000
9/2/2011	12:54:31 AM	BCl3 MFC set to  0.000000
9/2/2011	12:54:31 AM	PHl3 MFC set to  0.000000
9/2/2011	12:54:31 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:54:31 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:54:31 AM	Tube furnace set to 0
9/2/2011	12:55:01 AM	H2 valve closed
9/2/2011	12:55:01 AM	BCl3 valve closed
9/2/2011	12:55:01 AM	PH3 valve closed
9/2/2011	12:55:01 AM	SiCl4 pre valve closed
9/2/2011	12:55:01 AM	SiCl4 post valve closed
9/2/2011	12:55:01 AM	Bypass valve closed
9/2/2011	12:55:01 AM	Bubbler valve closed
9/2/2011	12:55:01 AM	Helium valve opened
9/2/2011	12:55:01 AM	Main Vac valve opened
9/2/2011	12:55:01 AM	Helium MFC set to  20.000000
9/2/2011	12:55:01 AM	H2 MFC set to  0.000000
9/2/2011	12:55:01 AM	BCl3 MFC set to  0.000000
9/2/2011	12:55:01 AM	PHl3 MFC set to  0.000000
9/2/2011	12:55:01 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:55:01 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:55:01 AM	Tube furnace set to 0
9/2/2011	12:55:31 AM	Helium valve closed
9/2/2011	12:55:31 AM	H2 valve closed
9/2/2011	12:55:31 AM	BCl3 valve closed
9/2/2011	12:55:31 AM	PH3 valve closed
9/2/2011	12:55:31 AM	SiCl4 pre valve closed
9/2/2011	12:55:31 AM	SiCl4 post valve closed
9/2/2011	12:55:31 AM	Bypass valve closed
9/2/2011	12:55:31 AM	Bubbler valve closed
9/2/2011	12:55:31 AM	Main Vac valve opened
9/2/2011	12:55:31 AM	Helium MFC set to  0.000000
9/2/2011	12:55:31 AM	H2 MFC set to  0.000000
9/2/2011	12:55:31 AM	BCl3 MFC set to  0.000000
9/2/2011	12:55:31 AM	PHl3 MFC set to  0.000000
9/2/2011	12:55:31 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:55:31 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:55:31 AM	Tube furnace set to 0
9/2/2011	12:56:00 AM	Run aborted at 12:56 AM
9/2/2011	12:56:00 AM	Helium valve closed
9/2/2011	12:56:00 AM	H2 valve closed
9/2/2011	12:56:00 AM	BCl3 valve closed
9/2/2011	12:56:00 AM	PH3 valve closed
9/2/2011	12:56:00 AM	SiCl4 pre valve closed
9/2/2011	12:56:00 AM	SiCl4 post valve closed
9/2/2011	12:56:00 AM	Bypass valve closed
9/2/2011	12:56:00 AM	Main Vac valve closed
9/2/2011	12:56:00 AM	Bubbler valve closed
9/2/2011	12:56:00 AM	Helium MFC set to  0.000000
9/2/2011	12:56:00 AM	H2 MFC set to  0.000000
9/2/2011	12:56:00 AM	BCl3 MFC set to  0.000000
9/2/2011	12:56:00 AM	PHl3 MFC set to  0.000000
9/2/2011	12:56:00 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:56:00 AM	Tube furnace set to 0
9/2/2011	12:56:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/2/2011	12:56:10 AM	Main Vac valve opened
9/2/2011	12:57:17 AM	Recipe started at 12:57 AM
9/2/2011	12:57:17 AM	Helium valve closed
9/2/2011	12:57:17 AM	H2 valve closed
9/2/2011	12:57:17 AM	BCl3 valve closed
9/2/2011	12:57:17 AM	PH3 valve closed
9/2/2011	12:57:17 AM	SiCl4 pre valve closed
9/2/2011	12:57:17 AM	SiCl4 post valve closed
9/2/2011	12:57:17 AM	Bypass valve closed
9/2/2011	12:57:17 AM	Bubbler valve closed
9/2/2011	12:57:17 AM	Main Vac valve opened
9/2/2011	12:57:17 AM	Helium MFC set to  0.000000
9/2/2011	12:57:17 AM	H2 MFC set to  0.000000
9/2/2011	12:57:17 AM	BCl3 MFC set to  0.000000
9/2/2011	12:57:17 AM	PHl3 MFC set to  0.000000
9/2/2011	12:57:17 AM	SiCl4 MFC set to  0.000000
9/2/2011	12:57:17 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:57:17 AM	Tube furnace set to 180
9/2/2011	1:27:17 AM	Helium valve closed
9/2/2011	1:27:17 AM	BCl3 valve closed
9/2/2011	1:27:17 AM	PH3 valve closed
9/2/2011	1:27:17 AM	SiCl4 pre valve closed
9/2/2011	1:27:17 AM	SiCl4 post valve closed
9/2/2011	1:27:17 AM	Main Vac valve closed
9/2/2011	1:27:17 AM	Bypass valve closed
9/2/2011	1:27:17 AM	Bubbler valve closed
9/2/2011	1:27:17 AM	H2 valve opened
9/2/2011	1:27:17 AM	Helium MFC set to  0.000000
9/2/2011	1:27:17 AM	H2 MFC set to  500.000000
9/2/2011	1:27:17 AM	BCl3 MFC set to  0.000000
9/2/2011	1:27:17 AM	PHl3 MFC set to  0.000000
9/2/2011	1:27:17 AM	SiCl4 MFC set to  0.000000
9/2/2011	1:27:17 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	1:27:17 AM	Tube furnace set to 1000
9/2/2011	1:28:22 AM	Helium valve closed
9/2/2011	1:28:22 AM	BCl3 valve closed
9/2/2011	1:28:22 AM	PH3 valve closed
9/2/2011	1:28:22 AM	SiCl4 pre valve closed
9/2/2011	1:28:22 AM	SiCl4 post valve closed
9/2/2011	1:28:22 AM	Main Vac valve closed
9/2/2011	1:28:22 AM	Bypass valve closed
9/2/2011	1:28:22 AM	H2 valve opened
9/2/2011	1:28:22 AM	Bubbler valve opened
9/2/2011	1:28:22 AM	Helium MFC set to  0.000000
9/2/2011	1:28:22 AM	H2 MFC set to  500.000000
9/2/2011	1:28:22 AM	BCl3 MFC set to  0.000000
9/2/2011	1:28:22 AM	PHl3 MFC set to  0.000000
9/2/2011	1:28:22 AM	SiCl4 MFC set to  0.000000
9/2/2011	1:28:22 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	1:28:22 AM	Tube furnace set to 1000
9/2/2011	1:28:23 AM	Helium valve closed
9/2/2011	1:28:23 AM	BCl3 valve closed
9/2/2011	1:28:23 AM	PH3 valve closed
9/2/2011	1:28:23 AM	SiCl4 pre valve closed
9/2/2011	1:28:23 AM	SiCl4 post valve closed
9/2/2011	1:28:23 AM	Main Vac valve closed
9/2/2011	1:28:23 AM	Bypass valve closed
9/2/2011	1:28:23 AM	H2 valve opened
9/2/2011	1:28:23 AM	Bubbler valve opened
9/2/2011	1:28:23 AM	Helium MFC set to  0.000000
9/2/2011	1:28:23 AM	H2 MFC set to  500.000000
9/2/2011	1:28:23 AM	BCl3 MFC set to  0.000000
9/2/2011	1:28:23 AM	PHl3 MFC set to  0.000000
9/2/2011	1:28:23 AM	SiCl4 MFC set to  0.000000
9/2/2011	1:28:23 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	1:28:23 AM	Tube furnace set to 1000
9/2/2011	1:48:23 AM	Helium valve closed
9/2/2011	1:48:23 AM	PH3 valve closed
9/2/2011	1:48:23 AM	Main Vac valve closed
9/2/2011	1:48:23 AM	Bypass valve closed
9/2/2011	1:48:23 AM	H2 valve opened
9/2/2011	1:48:23 AM	BCl3 valve opened
9/2/2011	1:48:23 AM	SiCl4 pre valve opened
9/2/2011	1:48:23 AM	SiCl4 post valve opened
9/2/2011	1:48:23 AM	Bubbler valve opened
9/2/2011	1:48:23 AM	Helium MFC set to  0.000000
9/2/2011	1:48:23 AM	H2 MFC set to  500.000000
9/2/2011	1:48:23 AM	BCl3 MFC set to  2.500000
9/2/2011	1:48:23 AM	PHl3 MFC set to  0.000000
9/2/2011	1:48:23 AM	SiCl4 MFC set to  50.000000
9/2/2011	1:48:23 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	1:48:23 AM	Tube furnace set to 1000
9/2/2011	2:00:23 AM	Helium valve closed
9/2/2011	2:00:23 AM	BCl3 valve closed
9/2/2011	2:00:23 AM	PH3 valve closed
9/2/2011	2:00:23 AM	SiCl4 pre valve closed
9/2/2011	2:00:23 AM	SiCl4 post valve closed
9/2/2011	2:00:23 AM	Main Vac valve closed
9/2/2011	2:00:23 AM	Bypass valve closed
9/2/2011	2:00:23 AM	H2 valve opened
9/2/2011	2:00:23 AM	Bubbler valve opened
9/2/2011	2:00:23 AM	Helium MFC set to  0.000000
9/2/2011	2:00:23 AM	H2 MFC set to  500.000000
9/2/2011	2:00:23 AM	BCl3 MFC set to  0.000000
9/2/2011	2:00:23 AM	PHl3 MFC set to  0.000000
9/2/2011	2:00:23 AM	SiCl4 MFC set to  0.000000
9/2/2011	2:00:23 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	2:00:23 AM	Tube furnace set to 750
9/2/2011	2:05:23 AM	H2 valve closed
9/2/2011	2:05:23 AM	BCl3 valve closed
9/2/2011	2:05:23 AM	PH3 valve closed
9/2/2011	2:05:23 AM	SiCl4 pre valve closed
9/2/2011	2:05:23 AM	SiCl4 post valve closed
9/2/2011	2:05:23 AM	Main Vac valve closed
9/2/2011	2:05:23 AM	Bypass valve closed
9/2/2011	2:05:23 AM	Helium valve opened
9/2/2011	2:05:23 AM	Bubbler valve opened
9/2/2011	2:05:23 AM	Helium MFC set to  500.000000
9/2/2011	2:05:23 AM	H2 MFC set to  0.000000
9/2/2011	2:05:23 AM	BCl3 MFC set to  0.000000
9/2/2011	2:05:23 AM	PHl3 MFC set to  0.000000
9/2/2011	2:05:23 AM	SiCl4 MFC set to  0.000000
9/2/2011	2:05:23 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	2:05:24 AM	Tube furnace set to 0
9/2/2011	2:25:24 AM	Helium valve closed
9/2/2011	2:25:24 AM	H2 valve closed
9/2/2011	2:25:24 AM	BCl3 valve closed
9/2/2011	2:25:24 AM	PH3 valve closed
9/2/2011	2:25:24 AM	SiCl4 pre valve closed
9/2/2011	2:25:24 AM	SiCl4 post valve closed
9/2/2011	2:25:24 AM	Main Vac valve closed
9/2/2011	2:25:24 AM	Bypass valve closed
9/2/2011	2:25:24 AM	Bubbler valve closed
9/2/2011	2:25:24 AM	Helium MFC set to  0.000000
9/2/2011	2:25:24 AM	H2 MFC set to  0.000000
9/2/2011	2:25:24 AM	BCl3 MFC set to  0.000000
9/2/2011	2:25:24 AM	PHl3 MFC set to  0.000000
9/2/2011	2:25:24 AM	SiCl4 MFC set to  0.000000
9/2/2011	2:25:24 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	2:25:24 AM	Tube furnace set to 0
9/2/2011	3:25:24 AM	H2 valve closed
9/2/2011	3:25:24 AM	BCl3 valve closed
9/2/2011	3:25:24 AM	PH3 valve closed
9/2/2011	3:25:24 AM	SiCl4 pre valve closed
9/2/2011	3:25:24 AM	SiCl4 post valve closed
9/2/2011	3:25:24 AM	Main Vac valve closed
9/2/2011	3:25:24 AM	Bypass valve closed
9/2/2011	3:25:24 AM	Bubbler valve closed
9/2/2011	3:25:24 AM	Helium valve opened
9/2/2011	3:25:24 AM	Helium MFC set to  500.000000
9/2/2011	3:25:24 AM	H2 MFC set to  0.000000
9/2/2011	3:25:24 AM	BCl3 MFC set to  0.000000
9/2/2011	3:25:24 AM	PHl3 MFC set to  0.000000
9/2/2011	3:25:24 AM	SiCl4 MFC set to  0.000000
9/2/2011	3:25:24 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	3:25:24 AM	Tube furnace set to 0
9/2/2011	3:25:30 AM	H2 valve closed
9/2/2011	3:25:30 AM	BCl3 valve closed
9/2/2011	3:25:30 AM	PH3 valve closed
9/2/2011	3:25:30 AM	SiCl4 pre valve closed
9/2/2011	3:25:30 AM	SiCl4 post valve closed
9/2/2011	3:25:30 AM	Main Vac valve closed
9/2/2011	3:25:30 AM	Bypass valve closed
9/2/2011	3:25:30 AM	Helium valve opened
9/2/2011	3:25:30 AM	Bubbler valve opened
9/2/2011	3:25:30 AM	Helium MFC set to  500.000000
9/2/2011	3:25:30 AM	H2 MFC set to  0.000000
9/2/2011	3:25:30 AM	BCl3 MFC set to  0.000000
9/2/2011	3:25:30 AM	PHl3 MFC set to  0.000000
9/2/2011	3:25:30 AM	SiCl4 MFC set to  0.000000
9/2/2011	3:25:30 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	3:25:30 AM	Tube furnace set to 0
9/2/2011	3:30:30 AM	Helium valve closed
9/2/2011	3:30:30 AM	H2 valve closed
9/2/2011	3:30:30 AM	BCl3 valve closed
9/2/2011	3:30:30 AM	PH3 valve closed
9/2/2011	3:30:30 AM	SiCl4 pre valve closed
9/2/2011	3:30:30 AM	SiCl4 post valve closed
9/2/2011	3:30:30 AM	Main Vac valve closed
9/2/2011	3:30:30 AM	Bypass valve closed
9/2/2011	3:30:30 AM	Bubbler valve closed
9/2/2011	3:30:30 AM	Helium MFC set to  0.000000
9/2/2011	3:30:30 AM	H2 MFC set to  0.000000
9/2/2011	3:30:30 AM	BCl3 MFC set to  0.000000
9/2/2011	3:30:30 AM	PHl3 MFC set to  0.000000
9/2/2011	3:30:30 AM	SiCl4 MFC set to  0.000000
9/2/2011	3:30:30 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	3:30:30 AM	Tube furnace set to 0
9/2/2011	3:30:31 AM	Helium valve closed
9/2/2011	3:30:31 AM	H2 valve closed
9/2/2011	3:30:31 AM	BCl3 valve closed
9/2/2011	3:30:31 AM	PH3 valve closed
9/2/2011	3:30:31 AM	SiCl4 pre valve closed
9/2/2011	3:30:31 AM	SiCl4 post valve closed
9/2/2011	3:30:31 AM	Main Vac valve closed
9/2/2011	3:30:31 AM	Bubbler valve closed
9/2/2011	3:30:31 AM	Bypass valve opened
9/2/2011	3:30:31 AM	Helium MFC set to  0.000000
9/2/2011	3:30:31 AM	H2 MFC set to  0.000000
9/2/2011	3:30:31 AM	BCl3 MFC set to  0.000000
9/2/2011	3:30:31 AM	PHl3 MFC set to  0.000000
9/2/2011	3:30:31 AM	SiCl4 MFC set to  0.000000
9/2/2011	3:30:31 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	3:30:31 AM	Tube furnace set to 0
9/2/2011	3:31:21 AM	Helium valve closed
9/2/2011	3:31:21 AM	H2 valve closed
9/2/2011	3:31:21 AM	BCl3 valve closed
9/2/2011	3:31:21 AM	PH3 valve closed
9/2/2011	3:31:21 AM	SiCl4 pre valve closed
9/2/2011	3:31:21 AM	SiCl4 post valve closed
9/2/2011	3:31:21 AM	Main Vac valve closed
9/2/2011	3:31:21 AM	Bubbler valve closed
9/2/2011	3:31:21 AM	Bypass valve opened
9/2/2011	3:31:21 AM	Helium MFC set to  0.000000
9/2/2011	3:31:21 AM	H2 MFC set to  0.000000
9/2/2011	3:31:21 AM	BCl3 MFC set to  0.000000
9/2/2011	3:31:21 AM	PHl3 MFC set to  0.000000
9/2/2011	3:31:21 AM	SiCl4 MFC set to  0.000000
9/2/2011	3:31:21 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	3:31:21 AM	Tube furnace set to 0
9/2/2011	3:32:21 AM	Helium valve closed
9/2/2011	3:32:21 AM	H2 valve closed
9/2/2011	3:32:21 AM	BCl3 valve closed
9/2/2011	3:32:21 AM	PH3 valve closed
9/2/2011	3:32:21 AM	SiCl4 pre valve closed
9/2/2011	3:32:21 AM	SiCl4 post valve closed
9/2/2011	3:32:21 AM	Bypass valve closed
9/2/2011	3:32:21 AM	Bubbler valve closed
9/2/2011	3:32:21 AM	Main Vac valve opened
9/2/2011	3:32:21 AM	Helium MFC set to  0.000000
9/2/2011	3:32:21 AM	H2 MFC set to  0.000000
9/2/2011	3:32:21 AM	BCl3 MFC set to  0.000000
9/2/2011	3:32:21 AM	PHl3 MFC set to  0.000000
9/2/2011	3:32:21 AM	SiCl4 MFC set to  0.000000
9/2/2011	3:32:21 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	3:32:21 AM	Tube furnace set to 0
9/2/2011	3:32:22 AM	Run finished at 3:32 AM
9/2/2011	8:19:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/2/2011	8:19:23 AM	Recipe started at 8:19 AM
9/2/2011	8:19:23 AM	Helium valve closed
9/2/2011	8:19:23 AM	H2 valve closed
9/2/2011	8:19:23 AM	BCl3 valve closed
9/2/2011	8:19:23 AM	PH3 valve closed
9/2/2011	8:19:23 AM	SiCl4 pre valve closed
9/2/2011	8:19:23 AM	SiCl4 post valve closed
9/2/2011	8:19:23 AM	Main Vac valve closed
9/2/2011	8:19:23 AM	Bypass valve closed
9/2/2011	8:19:23 AM	Bubbler valve closed
9/2/2011	8:19:23 AM	Helium MFC set to  0.000000
9/2/2011	8:19:23 AM	H2 MFC set to  0.000000
9/2/2011	8:19:23 AM	BCl3 MFC set to  0.000000
9/2/2011	8:19:23 AM	PHl3 MFC set to  0.000000
9/2/2011	8:19:23 AM	SiCl4 MFC set to  0.000000
9/2/2011	8:19:23 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	8:19:23 AM	Tube furnace set to 0
9/2/2011	8:19:26 AM	H2 valve closed
9/2/2011	8:19:26 AM	BCl3 valve closed
9/2/2011	8:19:26 AM	PH3 valve closed
9/2/2011	8:19:26 AM	SiCl4 pre valve closed
9/2/2011	8:19:26 AM	SiCl4 post valve closed
9/2/2011	8:19:26 AM	Main Vac valve closed
9/2/2011	8:19:26 AM	Bypass valve closed
9/2/2011	8:19:26 AM	Bubbler valve closed
9/2/2011	8:19:26 AM	Helium valve opened
9/2/2011	8:19:26 AM	Helium MFC set to  500.000000
9/2/2011	8:19:26 AM	H2 MFC set to  0.000000
9/2/2011	8:19:26 AM	BCl3 MFC set to  0.000000
9/2/2011	8:19:26 AM	PHl3 MFC set to  0.000000
9/2/2011	8:19:26 AM	SiCl4 MFC set to  0.000000
9/2/2011	8:19:26 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	8:19:26 AM	Tube furnace set to 0
9/2/2011	8:20:32 AM	Helium valve closed
9/2/2011	8:20:32 AM	H2 valve closed
9/2/2011	8:20:32 AM	BCl3 valve closed
9/2/2011	8:20:32 AM	PH3 valve closed
9/2/2011	8:20:32 AM	SiCl4 pre valve closed
9/2/2011	8:20:32 AM	SiCl4 post valve closed
9/2/2011	8:20:32 AM	Main Vac valve closed
9/2/2011	8:20:32 AM	Bypass valve closed
9/2/2011	8:20:32 AM	Bubbler valve closed
9/2/2011	8:20:32 AM	Helium MFC set to  0.000000
9/2/2011	8:20:32 AM	H2 MFC set to  0.000000
9/2/2011	8:20:32 AM	BCl3 MFC set to  0.000000
9/2/2011	8:20:32 AM	PHl3 MFC set to  0.000000
9/2/2011	8:20:32 AM	SiCl4 MFC set to  0.000000
9/2/2011	8:20:32 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	8:20:33 AM	Tube furnace set to 0
9/2/2011	8:20:34 AM	Run finished at 8:20 AM
9/2/2011	8:20:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/2/2011	8:23:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2011	8:23:38 AM	Recipe started at 8:23 AM
9/2/2011	8:23:38 AM	Helium valve closed
9/2/2011	8:23:38 AM	H2 valve closed
9/2/2011	8:23:38 AM	BCl3 valve closed
9/2/2011	8:23:38 AM	PH3 valve closed
9/2/2011	8:23:38 AM	SiCl4 pre valve closed
9/2/2011	8:23:38 AM	SiCl4 post valve closed
9/2/2011	8:23:38 AM	Main Vac valve closed
9/2/2011	8:23:38 AM	Bubbler valve closed
9/2/2011	8:23:38 AM	Bypass valve opened
9/2/2011	8:23:38 AM	Helium MFC set to  0.000000
9/2/2011	8:23:38 AM	H2 MFC set to  0.000000
9/2/2011	8:23:38 AM	BCl3 MFC set to  0.000000
9/2/2011	8:23:38 AM	PHl3 MFC set to  0.000000
9/2/2011	8:23:38 AM	SiCl4 MFC set to  0.000000
9/2/2011	8:23:38 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	8:23:38 AM	Tube furnace set to 0
9/2/2011	8:24:40 AM	Helium valve closed
9/2/2011	8:24:40 AM	H2 valve closed
9/2/2011	8:24:40 AM	BCl3 valve closed
9/2/2011	8:24:40 AM	PH3 valve closed
9/2/2011	8:24:40 AM	SiCl4 pre valve closed
9/2/2011	8:24:40 AM	SiCl4 post valve closed
9/2/2011	8:24:40 AM	Main Vac valve closed
9/2/2011	8:24:40 AM	Bubbler valve closed
9/2/2011	8:24:40 AM	Bypass valve opened
9/2/2011	8:24:40 AM	Helium MFC set to  0.000000
9/2/2011	8:24:40 AM	H2 MFC set to  0.000000
9/2/2011	8:24:40 AM	BCl3 MFC set to  0.000000
9/2/2011	8:24:40 AM	PHl3 MFC set to  0.000000
9/2/2011	8:24:40 AM	SiCl4 MFC set to  0.000000
9/2/2011	8:24:40 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	8:24:41 AM	Tube furnace set to 0
9/2/2011	8:25:41 AM	Helium valve closed
9/2/2011	8:25:41 AM	H2 valve closed
9/2/2011	8:25:41 AM	BCl3 valve closed
9/2/2011	8:25:41 AM	PH3 valve closed
9/2/2011	8:25:41 AM	SiCl4 pre valve closed
9/2/2011	8:25:41 AM	SiCl4 post valve closed
9/2/2011	8:25:41 AM	Bypass valve closed
9/2/2011	8:25:41 AM	Bubbler valve closed
9/2/2011	8:25:41 AM	Main Vac valve opened
9/2/2011	8:25:41 AM	Helium MFC set to  0.000000
9/2/2011	8:25:41 AM	H2 MFC set to  0.000000
9/2/2011	8:25:41 AM	BCl3 MFC set to  0.000000
9/2/2011	8:25:41 AM	PHl3 MFC set to  0.000000
9/2/2011	8:25:41 AM	SiCl4 MFC set to  0.000000
9/2/2011	8:25:41 AM	Bypass solenoid MFC set to  0.000000
9/2/2011	8:25:41 AM	Tube furnace set to 0
9/2/2011	8:25:42 AM	Run finished at 8:25 AM
9/2/2011	8:25:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2011	12:20:23 PM	Main Vac valve closed
9/2/2011	12:20:31 PM	Helium MFC set to  15.000000
9/2/2011	12:20:33 PM	Helium valve opened
9/2/2011	12:20:41 PM	Helium valve closed
9/2/2011	12:20:44 PM	Helium MFC set to  45.000000
9/2/2011	12:20:45 PM	Helium valve opened
9/2/2011	12:20:51 PM	Helium valve closed
9/2/2011	12:20:57 PM	Helium MFC set to  150.000000
9/2/2011	12:20:58 PM	Helium valve opened
9/2/2011	12:21:06 PM	Helium valve closed
9/2/2011	12:21:11 PM	Helium MFC set to  250.000000
9/2/2011	12:21:12 PM	Helium valve opened
9/2/2011	12:21:37 PM	Helium valve closed
9/2/2011	12:21:41 PM	Helium MFC set to  500.000000
9/2/2011	12:21:42 PM	Helium valve opened
9/2/2011	12:21:53 PM	Helium valve closed
9/2/2011	12:21:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/2/2011	12:21:57 PM	Recipe started at 12:21 PM
9/2/2011	12:21:57 PM	Helium valve closed
9/2/2011	12:21:57 PM	H2 valve closed
9/2/2011	12:21:57 PM	BCl3 valve closed
9/2/2011	12:21:57 PM	PH3 valve closed
9/2/2011	12:21:57 PM	SiCl4 pre valve closed
9/2/2011	12:21:57 PM	SiCl4 post valve closed
9/2/2011	12:21:57 PM	Main Vac valve closed
9/2/2011	12:21:57 PM	Bypass valve closed
9/2/2011	12:21:57 PM	Bubbler valve closed
9/2/2011	12:21:57 PM	Helium MFC set to  0.000000
9/2/2011	12:21:57 PM	H2 MFC set to  0.000000
9/2/2011	12:21:57 PM	BCl3 MFC set to  0.000000
9/2/2011	12:21:57 PM	PHl3 MFC set to  0.000000
9/2/2011	12:21:57 PM	SiCl4 MFC set to  0.000000
9/2/2011	12:21:57 PM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:21:57 PM	Tube furnace set to 0
9/2/2011	12:22:00 PM	H2 valve closed
9/2/2011	12:22:00 PM	BCl3 valve closed
9/2/2011	12:22:00 PM	PH3 valve closed
9/2/2011	12:22:00 PM	SiCl4 pre valve closed
9/2/2011	12:22:00 PM	SiCl4 post valve closed
9/2/2011	12:22:00 PM	Main Vac valve closed
9/2/2011	12:22:00 PM	Bypass valve closed
9/2/2011	12:22:00 PM	Bubbler valve closed
9/2/2011	12:22:00 PM	Helium valve opened
9/2/2011	12:22:00 PM	Helium MFC set to  500.000000
9/2/2011	12:22:00 PM	H2 MFC set to  0.000000
9/2/2011	12:22:00 PM	BCl3 MFC set to  0.000000
9/2/2011	12:22:00 PM	PHl3 MFC set to  0.000000
9/2/2011	12:22:00 PM	SiCl4 MFC set to  0.000000
9/2/2011	12:22:00 PM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:22:00 PM	Tube furnace set to 0
9/2/2011	12:22:39 PM	Helium valve closed
9/2/2011	12:22:39 PM	H2 valve closed
9/2/2011	12:22:39 PM	BCl3 valve closed
9/2/2011	12:22:39 PM	PH3 valve closed
9/2/2011	12:22:39 PM	SiCl4 pre valve closed
9/2/2011	12:22:39 PM	SiCl4 post valve closed
9/2/2011	12:22:39 PM	Main Vac valve closed
9/2/2011	12:22:39 PM	Bypass valve closed
9/2/2011	12:22:39 PM	Bubbler valve closed
9/2/2011	12:22:39 PM	Helium MFC set to  0.000000
9/2/2011	12:22:39 PM	H2 MFC set to  0.000000
9/2/2011	12:22:39 PM	BCl3 MFC set to  0.000000
9/2/2011	12:22:39 PM	PHl3 MFC set to  0.000000
9/2/2011	12:22:39 PM	SiCl4 MFC set to  0.000000
9/2/2011	12:22:39 PM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:22:39 PM	Tube furnace set to 0
9/2/2011	12:22:40 PM	Run finished at 12:22 PM
9/2/2011	12:22:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/2/2011	12:25:19 PM	Helium MFC set to  100.000000
9/2/2011	12:25:20 PM	Helium valve opened
9/2/2011	12:26:03 PM	Helium valve closed
9/2/2011	12:27:57 PM	Helium MFC set to  0.000000
9/2/2011	12:28:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/2/2011	12:28:02 PM	Recipe started at 12:28 PM
9/2/2011	12:28:02 PM	Helium valve closed
9/2/2011	12:28:02 PM	H2 valve closed
9/2/2011	12:28:02 PM	BCl3 valve closed
9/2/2011	12:28:02 PM	PH3 valve closed
9/2/2011	12:28:02 PM	SiCl4 pre valve closed
9/2/2011	12:28:02 PM	SiCl4 post valve closed
9/2/2011	12:28:02 PM	Main Vac valve closed
9/2/2011	12:28:02 PM	Bubbler valve closed
9/2/2011	12:28:02 PM	Bypass valve opened
9/2/2011	12:28:02 PM	Helium MFC set to  0.000000
9/2/2011	12:28:02 PM	H2 MFC set to  0.000000
9/2/2011	12:28:02 PM	BCl3 MFC set to  0.000000
9/2/2011	12:28:02 PM	PHl3 MFC set to  0.000000
9/2/2011	12:28:02 PM	SiCl4 MFC set to  0.000000
9/2/2011	12:28:02 PM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:28:02 PM	Tube furnace set to 0
9/2/2011	12:28:58 PM	Helium valve closed
9/2/2011	12:28:58 PM	H2 valve closed
9/2/2011	12:28:58 PM	BCl3 valve closed
9/2/2011	12:28:58 PM	PH3 valve closed
9/2/2011	12:28:58 PM	SiCl4 pre valve closed
9/2/2011	12:28:58 PM	SiCl4 post valve closed
9/2/2011	12:28:58 PM	Main Vac valve closed
9/2/2011	12:28:58 PM	Bubbler valve closed
9/2/2011	12:28:58 PM	Bypass valve opened
9/2/2011	12:28:58 PM	Helium MFC set to  0.000000
9/2/2011	12:28:58 PM	H2 MFC set to  0.000000
9/2/2011	12:28:58 PM	BCl3 MFC set to  0.000000
9/2/2011	12:28:58 PM	PHl3 MFC set to  0.000000
9/2/2011	12:28:58 PM	SiCl4 MFC set to  0.000000
9/2/2011	12:28:58 PM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:28:58 PM	Tube furnace set to 0
9/2/2011	12:29:58 PM	Helium valve closed
9/2/2011	12:29:58 PM	H2 valve closed
9/2/2011	12:29:58 PM	BCl3 valve closed
9/2/2011	12:29:58 PM	PH3 valve closed
9/2/2011	12:29:58 PM	SiCl4 pre valve closed
9/2/2011	12:29:58 PM	SiCl4 post valve closed
9/2/2011	12:29:58 PM	Bypass valve closed
9/2/2011	12:29:58 PM	Bubbler valve closed
9/2/2011	12:29:58 PM	Main Vac valve opened
9/2/2011	12:29:58 PM	Helium MFC set to  0.000000
9/2/2011	12:29:58 PM	H2 MFC set to  0.000000
9/2/2011	12:29:58 PM	BCl3 MFC set to  0.000000
9/2/2011	12:29:58 PM	PHl3 MFC set to  0.000000
9/2/2011	12:29:58 PM	SiCl4 MFC set to  0.000000
9/2/2011	12:29:58 PM	Bypass solenoid MFC set to  0.000000
9/2/2011	12:29:58 PM	Tube furnace set to 0
9/2/2011	12:29:59 PM	Run finished at 12:29 PM
9/2/2011	12:29:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
